rus
Issue #3/2023
T. O. Soshina
Tool Coatings Based on Tialn Produced by Middle-Frequency Pulsed Magnetron Spraying
Tool Coatings Based on Tialn Produced by Middle-Frequency Pulsed Magnetron Spraying
DOI: 10.22184/2499-9407.2023.32.3.44.51
The effect of pulse frequency during pulsed magnetron sputtering of a TiAlN coating on changes in the phase and elemental compositions of coatings, their microstructure, surface roughness, and physical and mechanical properties is considered. The optimal value of the pulse frequency at which a coating is formed based on the highly dispersed wear-resistant h-Ti3Al2N2 phase with a dense nanocrystalline structure, minimal surface roughness, high microhardness and elastic recovery is established.
The effect of pulse frequency during pulsed magnetron sputtering of a TiAlN coating on changes in the phase and elemental compositions of coatings, their microstructure, surface roughness, and physical and mechanical properties is considered. The optimal value of the pulse frequency at which a coating is formed based on the highly dispersed wear-resistant h-Ti3Al2N2 phase with a dense nanocrystalline structure, minimal surface roughness, high microhardness and elastic recovery is established.
Теги: microstructure phase composition physical and mechanical properties. pulsed magnetron spraying pulse frequency tialn coating импульсное магнетронное распыление микроструктура покрытие tialn фазовый состав физико-механические свойства частота импульса
Tool Coatings Based on Tialn Produced by Middle-Frequency Pulsed Magnetron Spraying
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